Apparatus and method for washing quartz parts, particularly for process equipment used in semiconductor industries
OwnerFabio Somboli, Raffaele Ninniinventors
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Abstract
An apparatus for washing quartz parts, particularly for process equipment used in semiconductor industries, comprising a process unit that is suitable to perform washing, a unit for managing washing and rinsing fluids, and a control unit, the units being mutually separate, the process unit comprising a bell-shaped element that is suitable to enclose hermetically the quartz parts to be washed, the quartz parts being inserted vertically in the bell-shaped element.
Claims19
An apparatus for washing quartz parts, particularly for process equipment used in semiconductor industries, comprising a process unit that is suitable to perform washing, a unit for managing washing and rinsing fluids, and a control unit, said units being mutually separate, said process unit comprising a bell-shaped element that is suitable to enclose hermetically said quartz parts to be washed, with said quartz parts inserted vertically in said bell-shaped element.
A method for washing quartz parts, comprising the steps of:
- introducing the quartz parts to be washed in a hermetic bell-shaped element;
- cooling said quartz parts and introducing hot water in said bell-shaped element;
- performing a step of chemical etching with jets of vapor against said quartz parts;
- rinsing said quartz parts;
- drying said quartz parts.
Dependencies are inferred from the claim text.