Method and device to clean probes
AssigneeFormFactor, Inc.
InventorsChristopher C. Buckholtz, Eric T. Watje
Life of this patent
Estimating the term…
Abstract
A probe cleaning system automatically detects a surface of a probe cleaning device during a cleaning process by providing a predetermined finish on the surface of the probe cleaning device. The predetermined finish can include a textured or machined finish or a marking, such that the predetermined finish provides contrast against the surface. Cameras in the system automatically focus on the surface, with the predetermined finish. This in-focus condition is related to a distance between probes and the surface. Once an in-focus condition is determined, the system performs an automated cleaning process by interacting the probes with the probe cleaning device.
Claims20
A system comprising:
- a probe card including probes;
- and
- a cleaning device that cleans said probes when brought into contact with said probes during a cleaning process, said cleaning device having a surface with a predetermined finish that allows a camera to automatically focus on said surface during said cleaning process.
A probe cleaning device comprising:
- a substrate layer;
- and
- a gel layer coupled to said substrate layer, said gel layer having a surface with a predetermined finish that allows a camera to automatically focus on said surface during a cleaning process.
A method of making a cleaning device comprising the steps of:
- manufacturing a mold having a mold surface that produces a predetermined surface finish;
- manufacturing a cleaning material with said mold such that a surface of said cleaning material includes said predetermined surface finish, said predetermined surface finish allowing a camera to automatically focus on said surface during a cleaning process;
- and
- coupling another surface of said cleaning material to a substrate, said another surface being opposite to said surface.
A method of cleaning probes comprising the steps of:
- placing a cleaning wafer having a surface that provides contrast in a field of view of a camera;
- controlling the cleaning wafer and the camera so that the camera detects an in-focus condition, said in-focus condition being when said surface is at a predetermined position that is in-focus within the field of view of the camera;
- and
- initiating a probe cleaning cycle once said in-focus condition has been detected by the camera, whereby during said probe cleaning cycle probes are brought into contact with at least said surface of said cleaning wafer based on said predetermined position of said surface relative to said probes.
Dependencies are inferred from the claim text.