System and method for reducing the chemical reactivity of water and other chemicals used in the fabrication of integrated circuits
OwnerAxel Preusse, Gerd Marxsen +1inventors
InventorsAxel Preusse, Gerd Marxsen, Johannes Groschopf
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Abstract
Methods and systems are provided that allow the reduction of the oxygen concentration and/or a concentration of other natural gases in process liquids used in the processing of substrates, preferably substrates that receive and/or contain exposed metal surfaces, such as copper surfaces. By introducing an inert gas in a water system or in a chemical storage tank for process liquids, already dissolved oxygen will be removed and the further dissolving of oxygen may be substantially prevented. Thus, the probability for the formation of corrosion and discoloration on copper surfaces is significantly reduced.
Claims18
A method of supplying water to a process tool, the method comprising:
- providing a water-providing system including a water reservoir, a water supply system and at least one supply line;
- and
- introducing an inert gas into at least one of the water reservoir, the water supply system and the at least one supply line to substantially prevent at least oxygen from being dissolved in the water.
A method of storing a process chemical, the method comprising:
- providing a storage tank for the process chemical, and
- introducing an inert gas into said storage tank to substantially prevent at least oxygen from being dissolved in the process chemical.
A system for providing water to a process tool, comprising:
- a water reservoir;
- a water supply system;
- at least one water supply line;
- an inert gas source;
- and
- a gas supply system connected to the inert gas source to introduce an inert gas into at least one of the water reservoir, the water supply system and the at least one water supply line.
A system for storing a process chemical, comprising:
- a storage tank configured to store said process chemical;
- an inert gas source;
- and
- a gas supply system connected to the inert gas source to introduce an inert gas into said storage tank.
Dependencies are inferred from the claim text.