Fluorinated molecules and methods of making and using same
OwnerAndrew J. Poss, Haridasan K. Nair +2inventors
InventorsAndrew J. Poss, Haridasan K. Nair, David Nalewajek, Timothy R. Demmin
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Abstract
Provided are polymers derived from fluoroalkyl norbornenes, fluorinated crotonates, fluorinated allyl alcohols, and combinations of two or more thereof for use in a wide variety of applications, including photoresist compositions. Also provided are methods for producing the fluoroalkyl norbornenes, fluorinated crotonates, and fluorinated allyl alcohols for use in the present polymers.
Claims43
A polymer comprising a repeating unit derived from a compound selected from the group consisting of:
- (A) fluoroalkyl norbornenes of formula 1
- 9
- wherein X and Y are independently hydrogen, fluorine, or fluorinated alkyl;
- Rf is a fluorinated alkyl group;
- Z is —CH2OH, —CO2R, or —C(O)R1;
- R is an alkyl group;
- and R1 is hydrogen, hydroxyl, halogen, or nitrile;
- (B) fluorinated crotonates of formula 2
- 10
- wherein X and Y are independently hydrogen, fluorine, or fluorinated alkyl;
- Rf is a fluorinated alkyl group;
- Z is —CH2OH, —CO2R, or —C(O)R1;
- R is an alkyl group;
- and R1 is hydrogen, hydroxyl, halogen, or nitrile;
- (C) fluorinated allyl alcohols of formula 3
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- wherein X and Y are independently hydrogen, fluorine, or fluorinated alkyl;
- Rf is a fluorinated alkyl group;
- Z is —CH2OH, —CO2R, or —C(O)R1;
- R is an alkyl group;
- and R1 is hydrogen, hydroxyl, halogen, or nitrile;
- and
- (D) combinations of two or more thereof.
A method for making a compound selected from the group consisting of fluorinated crotonates, fluoroalkyl norbornenes, and fluorinated allyl alcohols comprising the steps of:
- (a) reacting the acid compound described by the formula:
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- with an esterification agent to form a halogenated crotonate;
- and
- (b) converting said halogenated crotonate to a compound selected from the group consisting of fluorinated crotonates, fluoroalkyl norbornenes, and fluorinated allyl alcohols.
A method for making a compound selected from the group consisting of fluorinated crotonates, fluoroalkyl norbornenes, and fluorinated allyl alcohols comprising the steps of:
- (a) reacting a compound described by the formula:
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- with a fluorinating agent to form a halogenated ester;
- and
- (b) converting said halogenated ester to a compound selected from the group consisting of fluorinated crotonates, fluoroalkyl norbornenes, and fluorinated allyl alcohols.
Dependencies are inferred from the claim text.