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US 2003/0228530 A1Published application
Extreme ultraviolet mask with improved absorber
AssigneeIntel Corporation
InventorsPei-Yang Yan, Guojing Zhang
Life of this patent
Estimating the term…
Abstract
The present invention discloses an EUV mask having an improved absorber layer with a certain thickness that is formed from a metal and a nonmetal in which the ratio of the metal to the nonmetal changes through the thickness of the improved absorber layer and a method of forming such an EUV mask.
Claims25
A method comprising:
- providing a substrate;
- forming a mirror over said substrate, said mirror being reflective at a wavelength;
- forming an improved absorber layer over said mirror, said improved absorber layer being absorbent at said wavelength, said improved absorber layer having a thickness, said improved absorber layer comprising a metal and a nonmetal, wherein a ratio of said metal to said nonmetal changes through said thickness;
- and
- removing said improved absorber layer in a first region while leaving said improved absorber layer in a second region.
2 more elements
A method comprising:
- providing a substrate;
- forming a multilayer mirror over said substrate, said multilayer mirror being reflective at a wavelength;
- forming an improved absorber layer over said multilayer mirror, said improved absorber layer being absorbent at said wavelength, said improved absorber layer having a thickness, said improved absorber layer comprising a first element doped with a second element, wherein a ratio of said second element to said first element is less than 0.6 to 1.0;
- removing said improved absorber layer in a first region while leaving said improved absorber layer in a second region.
1 more element
A mask comprising:
- a substrate;
- a mirror disposed over said substrate, said mirror having a first region and a second region;
- and
- an improved absorber layer disposed over said second region of said mirror, said improved absorber layer having a thickness, said improved absorber layer comprising a metal and a nonmetal, wherein a ratio of said metal to said nonmetal changes through said thickness.
1 more element
Dependencies are inferred from the claim text.