Method of assisting sample inclination error adjustment
AssigneeFuji Photo Optical Co., Ltd.
InventorsFumio Kobayashi, Zongtao Ge, Kunihiko Tanaka
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AssigneeFuji Photo Optical Co., Ltd.
InventorsFumio Kobayashi, Zongtao Ge, Kunihiko Tanaka
Estimating the term…
While a ferrule held by a clamping apparatus is rotated by a predetermined angle, respective interference fringe images of a spherical leading end part of the ferrule are obtained at three or more rotational positions. Respective interference fringe center positions are obtained in thus obtained three or more interference fringe images. The center position of a circle passing near each of the interference fringe center positions is calculated and defined as a measured center position. Relative distance information between the measured center position and a position corresponding to the rotational center position of the spherical leading end part of the ferrule or the relative distance information and relative directional information thereof are outputted as an inclination error adjustment value for the axis of the ferrule.
A method of assisting sample inclination error adjustment for assisting inclination error adjustment of an axis of a ferrule when a curved leading end face of said ferrule as a sample held by a clamping apparatus is observed by an interferometer apparatus, said method comprising the steps of:
Dependencies are inferred from the claim text.