Oxidizing method and oxidation system
OwnerShoichi Sato, Kazuhide Hasebe +1inventors
InventorsShoichi Sato, Kazuhide Hasebe, Kota Umezawa
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Abstract
An oxidation method of oxidizing surfaces of workpieces heated at a predetermined temperature in a vacuum atmosphere in a processing vessel produces active hydroxyl and active oxygen species. The active hydroxyl and active oxygen species oxidize the surfaces of the workpieces in a processing vessel. Both the intrafilm thickness uniformity and the characteristics of the oxide film can be improved, maintaining oxidation rate on a relatively high level.
Claims20
An oxidation method of oxidizing surfaces of workpieces heated at a predetermined temperature in a vacuum atmosphere within a processing vessel, said oxidation method comprising the steps of:
- producing active hydroxyl and active oxygen species;
- and
- oxidizing the surfaces of the workpieces by the active hydroxyl and the active oxygen species.
An oxidation system comprising:
- a processing vessel for containing workpieces;
- a support means for supporting workpieces in a processing region in the processing vessel;
- a heating means for heating workpieces;
- an evacuation system for evacuating the processing vessel;
- an oxidative gas supply system for supplying an oxidative gas into the processing vessel;
- and
- a reductive gas supply system separate from the oxidative gas supply system, for supplying a reductive gas into the processing vessel to produce active hydroxyl and active oxygen species by the interaction of the oxidative gas and the reductive gas;
- wherein surfaces of workpieces placed in the processing region are oxidized by the active hydroxyl and the active oxygen species.
Dependencies are inferred from the claim text.