Sacrificial polishing substrate for improved film thickness uniformity and planarity
AssigneeIntel Corporation
InventorJoe Cho
Life of this patent
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Abstract
A method and apparatus for planarizing semiconductor wafers utilized a sacrificial substrate. The sacrificial substrate, in the form of a sacrificial ring or a sacrificial disc, allows the wafer to sit flush inside the sacrificial substrate. The sacrificial substrate acts as a sacrificial extension of the wafer to be polished and experiences the edge roll-off effect during the polishing process instead of the wafer to be polished. As a result, the wafer to be polished has improved flatness and film thickness uniformity due to shifting the edge roll-off effects beyond the edge of the wafer to be polished outwards to the sacrificial substrate.
Claims46
A sacrificial ring, comprising:
- a substrate formed in a ring shape, wherein an inner diameter of the substrate is slightly larger than an outer diameter of a wafer to be polished, and the wafer to be polished fits flush inside the substrate.
A sacrificial disc, comprising:
- a substrate formed in a disc shape, wherein the substrate includes a recessed pocket, and a wafer to be polished fits flush inside the recessed pocket of the substrate.
A polishing machine, comprising:
- a polishing table;
- a polishing pad on the polishing table;
- a slurry supplier to supply a slurry onto the polishing table to polish a wafer;
- a retaining ring;
- a sacrificial substrate;
- and
- a polishing head, to dispose of the retaining ring, the sacrificial substrate, and the wafer therein, wherein the wafer is retained by the sacrificial substrate, the sacrificial substrate is retained by the retaining ring, and the retaining ring is contained in the polishing head such that a wafer surface and a sacrificial substrate surface to be polished are facing the polishing pad.
A method of manufacturing a sacrificial ring, comprising:
- slicing a rod shaped substrate to produce a plurality of wafers;
- cutting a circle out of a center of the plurality of wafers to form a plurality of sacrificial rings, a diameter of the circle being approximately equal to a diameter of a wafer to be polished;
- and
- depositing a material on a first surface of the plurality of sacrificial rings, wherein the material deposited is same as a material to be polished on the wafer to be polished.
A method of manufacturing a sacrificial ring, comprising:
- forming a paste and filling a mold of a sacrificial ring with the paste;
- firing the mold including the paste to form a sacrificial ring;
- and
- depositing a material on a first surface of the sacrificial ring, wherein the material deposited is same as a material to be polished on a wafer to be polished.
A method of manufacturing a sacrificial disc, comprising:
- slicing a rod shaped substrate to produce a plurality of wafers;
- cutting a recessed pocket out of a center of the plurality of wafers to form a plurality of sacrificial discs, a diameter of the recessed pocket being approximately equal to a diameter of a wafer to be polished, and a depth of the recessed pocket being approximately equal to a thickness of the wafer to be polished;
- and
- depositing a material on a first surface of the plurality of sacrificial discs, wherein the material deposited is same as a material to be polished on the wafer to be polished.
A method of manufacturing a sacrificial disc, comprising:
- forming a paste and filling a mold of a sacrificial disc with the paste;
- firing the mold including the paste to form a sacrificial disc;
- and
- depositing a material on a first surface of the sacrificial disc, wherein the material deposited is same as a material to be polished on a wafer to be polished.
A method of manufacturing an integrated circuit, comprising:
- providing a semiconductor device formed on a wafer to be polished with a first dielectric layer formed thereon;
- forming a first opening in the first dielectric layer, said forming the first opening exposing the semiconductor device;
- depositing a conductive material over said first dielectric layer and filling said first opening;
- selecting a sacrificial substrate with a conductive material deposited on a polishing surface that is same as the conductive material deposited over the first dielectric layer filling the first opening on the wafer to be polished;
- mounting the wafer to be polished in the sacrificial substrate, and mounting the sacrificial substrate and the wafer to be polished into a retaining ring contained within a polishing head;
- positioning the polishing head containing the wafer to be polished, the sacrificial substrate, and the retaining ring on a polishing pad mounted to a rotating platen;
- applying a polishing slurry to the rotating polishing pad;
- and
- polishing the wafer to be polished to remove an amount of the conductive material deposited on the wafer to be polished to expose the first dielectric layer and provide a planar polished surface of the conductive material.
Dependencies are inferred from the claim text.