Method of fabricating capacitor

Abstract

A capacitor fabricating method of the present invention includes the steps of: selectively forming a positive photosensitive resin layer on a first conductive layer; exposing the positive photosensitive resin layer, thereby obtaining an exposed positive photosensitive resin layer; immersing the exposed positive photosensitive resin layer in a solution in which dielectric particles are dispersed to diffuse the dielectric particles into the positive photosensitive resin layer; forming an insulating resin layer so as to cover side faces of the positive photosensitive resin layer; and forming a second conductive layer on the positive photosensitive resin layer. According to the method, a very reliable capacitor having excellent electric characteristics such as dielectric strength characteristic can be cheaply and easily fabricated in a wiring layer.

Dependencies are inferred from the claim text.