Stimulation sensitive composition and compound

A photosensitive or heat sensitive composition comprising:

• (A) a compound represented by formula (I) which is capable of generating an acid by irradiation of actinic ray or by heat:
• 248
• wherein Ar represents an aryl group or an aromatic group containing a hetero atom,
• R6 represents a hydrogen atom, a cyano group, an alkyl group or an aryl group,
• R7 represents a monovalent organic group,
• Y1 and Y2 maybe the same or different, and represents an alkyl group, an aryl group, an aralkyl group or an aromatic group containing a hetero atom, Y1 and Y2 may be bonded to each other to form a ring,
• Ar and at least one of Y1 and Y2 may be bonded to each other to form a ring,
• Ar and R6 may be bonded to each other to form a ring,
• R6 and R7 may be bonded to each other to form a ring,
• Ar, R6, R7, Y1 or Y2 is bonded at any one position through a linking group, so that the component (A) may have 2 or more of the structures of formula (I),
• X− represents a non-nucleophilic anion.

A compound represented by formula (I):

• 249
• wherein Ar represents an aryl group or an aromatic group containing a hetero atom,
• R6 represents a hydrogen atom, a cyano group, an alkyl group or an aryl group,
• R7 represents a monovalent organic group,
• Y1 and Y2 maybe the same or different, and represents an alkyl group, an aryl group, an aralkyl group or an aromatic group containing a hetero atom. Y1 and Y2 may be bonded to each other to form a ring,
• Ar and at least one of Y1 and Y2 may be bonded to each other to form a ring,
• Ar and R6 may be bonded to each other to form a ring,
• R6 and R7 may be bonded to each other to form a ring,
• Ar, R6, R7, Y1 or Y2 is bonded at any one position through a linking group, so that the component (A) may have 2 or more of the structures of formula (I),
• X− represents a non-nucleophilic anion.

A positive type photosensitive or heat sensitive composition comprising:

• (A) a compound represented by formula (I) which is capable of generating an acid by irradiation of actinic ray or by heat, and
• (B) a resin increasing the solubility in an alkali developing solution by the action of an acid:
• 250
• wherein Ar represents an aryl group or an aromatic, group containing a hetero atom,
• R6 represents a hydrogen atom, a cyano group, an alkyl group or an aryl group,
• R7 represents a monovalent organic group,
• Y1 and Y2 may be the same or different, and represents an alkyl group, an aryl group, an aralkyl group or an aromatic group containing a hetero atom, Y1 and Y2 may be bonded to each other to form a ring,
• Ar and at least one of and Y1 and Y2 may be bonded to each other to form a ring,
• Ar and R6 may be bonded to each other to form a ring,
• R6 and R7 may be bonded to each other to form a ring,
• Ar, R6, R7, Y1 or Y2 is bonded at any one position through a linking group, so that the component (A) may have 2 or more of the structures of formula (I),
• X− represents a non-nucleophilic anion.

A positive type photosensitive or heat sensitive composition comprising:

• (A) a compound represented by formula (I) which is capable of generating an acid by irradiation of actinic ray or by heat,
• (D) a resin which is soluble in an alkali developing solution, and
• (C) a compound having a molecular weight of not more than 3000 which is capable of decomposing by the action of acid to increase solubility in an alkali developing solution:
• 251
• wherein Ar represents an aryl group or an aromatic group containing a hetero atom,
• R6 represents a hydrogen atom, a cyano group, an alkyl group or an aryl group,
• R7 represents a monovalent organic group,
• Y1 and Y2 may be the same or different, and represents an alkyl group, an aryl group, an aralkyl group or an aromatic group containing a hetero atom, Y1 and Y2 may be bonded to each other to form a ring,
• Ar and at least one of and Y1 and Y2 may be bonded to form a ring,
• Ar and R6 may be bonded to each other to form a ring,
• R6 and R7 may be bonded to each other to form a ring,
• Ar, R6, R7, Y1 or Y2 is bonded at any one position through a linking group, so that the component (A) may have 2 or more of the structures of formula (I),
• X− represents a non-nucleophilic anion.

A negative type photosensitive or heat sensitive composition comprising:

• (A) a compound represented by formula (I) which is capable of generating an acid by irradiation of actinic ray or by heat,
• (D) a resin which is soluble in an alkali developing solution, and
• (E) a crosslinking agent which is capable of crosslinking with the alkali-soluble resin by the action of an acid:
• 252
• wherein Ar represents an aryl group or an aromatic group containing a hetero atom,
• R6 represents a hydrogen atom, a cyano group, an alkyl group or an aryl group,
• R7 represents a monovalent organic group,
• Y1 and Y2 may be the same or different, and represents an alkyl group, an aryl group, an aralkyl group or an aromatic group containing a hetero atom, Y1 and Y2 may be bonded to each other to form a ring,
• Ar and at least one Ar and Y1 and Y2 may be bonded to each other to form a ring,
• Ar and R6 may be bonded to each other to form a ring,
• R6 and R7 may be bonded to each other to form a ring,
• Ar, R6, R7, Y1 or Y2 is bonded at any one position through a linking group, so that the component (A) may have 2 or more of the structures of formula (I),
• X− represents a non-nucleophilic anion.