Piano MEMs micromirror

A micro-electro-mechanical device for pivotally supporting an at least partially reflective surface on a substrate comprising:

• a first torsional hinge mounted on the substrate, rotatable about a first axis;
• a gimbal ring surrounding the first torsional hinge, opposite ends of the first torsional hinge being fixed to opposite sides of the gimbal ring;
• a second torsional hinge rotatable about a second axis perpendicular to the first axis, the second torsional hinge comprising first and second arms extending from opposite sides of the gimbal ring, respectively;
• and
• a platform for supporting the reflective surface connected to the second torsional hinge.

A wavelength switch for controlling the direction of individual wavelength channels from an input optical signal to one or more of a plurality of output ports comprising:

• an input port for launching the input optical signal, and for dividing the input optical signal into first and second sub-beams having the same polarization;
• a dispersive element for dividing each of the first and second sub-beams into distinct wavelength channels;
• a plurality of micro-electro-mechanical devices, each device for pivotally supporting first and second reflective surface on a substrate, each device comprising:
• a platform including first and second supporting regions, each defined by a width and a length for supporting the first and second reflective surfaces, respectively, and brace means extending therebetween defined by a width and a length;
• a first torsional hinge, rotatable about a first axis perpendicular to said brace means, and extending between at least one anchor post of the substrate and the platform proximate the brace means;
• first and second electrodes positioned on the substrate beneath the first and second supporting regions, respectively, for selectively controlling the position of the platform;
• wherein the total width of the first torsional hinge and said brace means is less than the width of the first or the second supporting regions, whereby the plurality of micro-electro-mechanical devices are positionable in close proximity with each other with only an air gap between adjacent first supporting regions and between adjacent second supporting regions;
• whereby the micro-electro-mechanical devices are independently controllable for directing any number of the wavelength channels back to the dispersive element for recombination and output any one of the output ports.