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US 2003/0223154 A1Published application
Method for encapsulation of a U shape micro-actuator
OwnerMing Gao Yaoinventor
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Abstract
A system and method for preventing particle generation by the micro-actuator during deformation by partially encapsulating the micro-actuator with a coating is disclosed. The coating may be made of a soft and tenacious material. The coating may be applied to the rigid areas of the micro-actuator.
Claims24
An actuator, comprising:
- an actuator element having a generally ‘U’-shaped structure, the actuator including a support frame of a first material;
- and
- a coating at least partially encapsulating the actuator element to prevent particle generation, the coating comprising a second material.
A system, comprising:
- an actuator element having a generally ‘U’-shaped structure, the actuator element including a support frame of a first material;
- a coating at least partially encapsulating the actuator element to prevent particle generation, the coating comprising a second material;
- and
- a slider element adapted to be coupled to the actuator element.
1 more element
A method, comprising:
- at least partially encapsulating an actuator element having a generally ‘U’-shaped structure with a coating to prevent particle generation, the actuator element including a support frame of a first material and the coating comprising a second material.
Dependencies are inferred from the claim text.