Inspection apparatus for inspecting resist removal width
AssigneeNidek Co., Ltd.
InventorsEiji Yonezawa, Tadashi Aoyama
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Abstract
An inspection apparatus for inspecting a resist boundary on a substrate having an outer surrounding portion, includes: an illumination unit which illuminates the outer surrounding portion of the substrate; a detector which detects light reflected from the outer surrounding portion; and a judgment unit which judges, based on light intensity of the detected reflected light, whether a resist removal width is proper.
Claims17
An inspection apparatus for inspecting a resist boundary on a substrate having an outer surrounding portion, the inspection apparatus comprising:
- an illumination unit which illuminates the outer surrounding portion of the substrate;
- a detector which detects light reflected from the outer surrounding portion;
- and
- a judgment unit which judges, based on light intensity of the detected reflected light, whether a resist removal width is proper.
An inspection apparatus for inspecting a resist boundary on a substrate having an outer surrounding portion, the inspection apparatus comprising:
- an illumination unit which illuminates the outer surrounding portion of the substrate;
- a light detector which detects light reflected from the outer surrounding portion;
- and
- an image processor stores program for judging, based on light intensity of the detected reflected light, whether a resist removal width is proper.
Dependencies are inferred from the claim text.