Fixed wavelength vertical cavity optical devices and method of manufacture therefor
AssigneeAgilent Technologies, Inc.
InventorsJeffrey N. Miller, Virginia M. Robbins, Steven D. Lester
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Abstract
Vertical cavity optical devices, and a method of manufacturing therefor, are provided where the method includes partially forming a first vertical cavity optical device on a wafer, adjusting the lasing wavelength of the first vertical cavity optical device, and fixing the lasing wavelength of the first vertical cavity optical device to complete the forming thereof.
Claims22
A method for manufacturing vertical cavity optical devices comprising:
- partially forming a first vertical cavity optical device on a wafer;
- adjusting the lasing wavelength of the first vertical cavity optical device;
- and
- fixing the lasing wavelength of the first vertical cavity optical device to complete the forming thereof.
A method for manufacturing vertical cavity optical devices comprising:
- partially forming a first adjustable vertical cavity optical device on a substrate;
- adjusting the lasing wavelength of the first adjustable vertical cavity optical device using a voltage;
- and
- fixing the lasing wavelength of the first adjustable vertical cavity optical device by fixing a height of an air gap therein to complete the forming thereof.
Vertical cavity optical devices comprising:
- a first adjustable vertical cavity optical device on a wafer;
- and
- a structure for fixing the first adjustable vertical cavity optical device at a first adjustment for providing a first lasing wavelength.
Vertical cavity optical devices comprising:
- a first adjustable vertical cavity optical device on a substrate, the first adjustable vertical cavity optical device having an adjustable lasing wavelength by adjusting a height of an air gap provided therein;
- and
- a structure for fixing the lasing wavelength of the first adjustable vertical cavity optical device by fixing the height of the air gap therein.
Dependencies are inferred from the claim text.