Polymers, resist compositions and patterning process
AssigneesShin-Etsu Chemical Co., Ltd., Matsushita Electric Industrial Co., Ltd., Central Glass Company, Limited
InventorsYuji Harada, Jun Hatakeyama, Yoshio Kawai, Masaru Sasago, Masayuki Endo, Shinji Kishimura, Kazuhiko Maeda, Michitaka Ootani, Haruhiko Komoriya
Life of this patent
Estimating the term…
Abstract
A resist composition comprising a base polymer having a fluorinated sulfonate or fluorinated sulfone introduced therein is sensitive to high-energy radiation below 300 nm, has excellent transparency, contrast and adherence, and is suited for lithographic microprocessing.
Claims15
A polymer comprising recurring units each having a functional group of the following general formula (1), and having a weight average molecular weight of 1,000 to 500,000,
- 45
- wherein R1 is a methylene group, oxygen atom, sulfur atom or SO2, R2 to R5 each are hydrogen, fluorine, a straight, branched or cyclic alkyl or fluorinated alkyl group of 1 to 20 carbon atoms, —R6—SO3R7 or —R6—SO2R7, at least one of R2 to R5 containing —R6—SO3R7 or —R6—SO2R7, R6 is a valence bond or a straight, branched or cyclic alkylene or fluorinated alkylene group of 1 to 20 carbon atoms, R7 is fluorine or a straight, branched or cyclic fluorinated alkyl group of 1 to 20 carbon atoms which may contain a hydrophilic group such as hydroxyl, and “a” is 0 or 1.
A polymer comprising recurring units of the following general formula (3) and having a weight average molecular weight of 1,000 to 500,000,
- 47
- wherein R23 is a methylene group, oxygen atom, sulfur atom or SO2, R24 to R27 each are hydrogen, fluorine, —R28—SO2F, —R28—SO3R29 or a straight, branched or cyclic alkyl or fluorinated alkyl group of 1 to 30 carbon atoms, at least one of R24 to R27 containing —R28—SO2F or —R28—SO3R29, R28 is a valence bond or a straight, branched or cyclic alkylene or fluorinated alkylene group of 1 to 20 carbon atoms, R29 is an acid labile group, an adhesive group or a straight, branched or cyclic fluorinated alkyl group of 1 to 20 carbon atoms which may contain a hydrophilic group such as hydroxyl, and e is 0 or 1.
Dependencies are inferred from the claim text.