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US 2003/0214232 A1Published application
Uniform deposition of organic layer
AssigneeOsram Opto Semiconductors (Malaysia) Sdn. Bhd
InventorsEwald Guenther, Hooi Bin Lim, Cheng Kooi Tan, Shi Chai Chong, Hagen Klausmann
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Abstract
A method to ensure uniform deposition of organic layer is disclosed. Since the organic layer is very thin, any deviation from the target thickness will result in visible optical defects. A homogenous layer which exhibits good coating behaviour with organic materials is provided beneath the organic layer. By covering the metal interconnects, the adverse effect on the uniformity of the polymer layer is reduced or prevented.
Claims12
An device comprising:
- a substrate with an active region;
- a cap bonding region surrounding the active region;
- a homogenous layer located above a metallization layer, the homogenous layer promotes coating uniformity of one or more organic layer on the substrate and hence reducing or preventing the adverse effect of metal;
- and
- a cap bonded to the substrate in the cap bonding region.
2 more elements
Dependencies are inferred from the claim text.