Semiconductor device
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorShunji Kubo
Life of this patent
Estimating the term…
Abstract
A semiconductor device is provided, in which drivability of a transistor in a peripheral circuit region is improved. The peripheral circuit region includes a second semiconductor region formed on the semiconductor substrate, a second gate insulating film thinner than a first gate insulating film, a second gate electrode formed on the second gate insulating film, and source and drain regions formed at both sides of the second gate electrodes in the second semiconductor region and doped with an impurity of first conductivity. The source and drain regions include a p-type low-concentration impurity region having an impurity of first conductivity in relatively low concentration and a p-type high-concentration impurity region having an impurity of first conductivity in relatively high concentration.
Claims3
A semiconductor device, comprising:
- a semiconductor substrate having a main surface;
- a memory cell region formed on said semiconductor substrate;
- and
- a peripheral circuit region formed on said semiconductor substrate;
- wherein
- said memory cell region includes a first semiconductor region of a first conductivity formed on said semiconductor substrate,
- a first gate insulating film formed on said main surface to be positioned on said first semiconductor region, and
- a first gate electrode formed on said first gate insulating film;
- wherein
- said peripheral circuit region includes a second semiconductor region of a second conductivity formed on said semiconductor substrate,
- a second gate insulating film thinner than said first gate insulating film formed on said main surface to be positioned on said second semiconductor region,
- a second gate electrode formed on said second gate insulating film, and
- source and drain regions formed at both sides of said second gate electrodes in said second semiconductor region and doped with an impurity of a first conductivity;
- and wherein
- said source and drain regions include a low-concentration impurity region having an impurity of the first conductivity and a high-concentration impurity region having an impurity of the first conductivity of higher concentration than that of low-concentration impurity region.
Dependencies are inferred from the claim text.