Wafer shipping and storage container

Abstract

A wafer shipping and storage container includes a base, a tray, and a lid. The base is rigid providing a platform for the tray. The base has a tray recess dimensioned to be slightly larger than the tray. The tray recess has a plurality of elastic pillars attached that project away from the top surface. Each pillar is encompassed by an elastic stop shorter than the pillars. The tray has a wafer recess dimensioned to accept a disk. The perimeter of the top surface has a plurality of holes passing through the tray that correspond in size and placement to accept the pillars from the base. An additional adhesive recess may be recessed within the disk recess. The adhesive recess is sized to contain a gel adhesive or other releasable adhesive containing a plurality of support strands, which may be used to support and hold the disk within the tray. One or more vacuum openings may extend to the adhesive recess to pull the adhesive away from the disk when the disk is being removed from the tray. The lid is used to close the container.

Dependencies are inferred from the claim text.