Oxygen sensor and method of manufacturing same

A method of manufacturing an oxygen sensor, comprising:

• laminating a heater pattern, an insulating layer, a first gas diffusion layer and a solid electrolyte layer on the outside of a base, in this sequence;
• forming a second pumping electrode on the outside of said solid electrolyte layer;
• forming a first pumping electrode on the inside of said solid electrolyte layer facing said second pumping electrode;
• forming a reference electrode on the outside of said solid electrolyte layer;
• disposing a second gas diffusion layer and a dense layer that are disposed in parallel with each other, and cover a periphery of said solid electrolyte layer such that the portion formed with said second pumping electrode is covered with said second gas diffusion layer, and the portion formed with said reference electrode is covered with said dense layer;
• connecting an oxygen supply power source that applies oxygen to said reference electrode, between said reference electrode and said first pumping electrode.

An oxygen sensor comprising:

• a solid electrolyte layer having an oxygen ion conductivity;
• a pair of pumping electrodes formed to face each other with said solid electrolyte layer therebetween;
• a reference electrode formed to face one of said pair of pumping electrodes with said solid electrolyte layer therebetween;
• and
• a dense layer dividing said solid electrolyte layer between the other pumping electrode and said reference electrode,
• wherein an electromotive force generated between said one pumping electrode and said reference electrode is output as a first detection signal;
• and also
• a limiting current flowing between said pair of pumping electrodes is output as a second detection signal.

A method of manufacturing an oxygen sensor, comprising:

• laminating a heater pattern, an insulating layer and a first gas diffusion layer, on the outside of a base, in this sequence;
• laminating two solid electrolyte layers disposed in parallel with each other with predetermined spacing therebetween, on the outside of said first gas diffusion layer;
• forming, on insides of said two solid electrolyte layers, a first pumping electrode so as to be across said two solid electrolyte layers;
• forming a second pumping electrode on the outside of one of said two solid electrolyte layers and forming a reference electrode on the outside of the other solid electrolyte layer;
• disposing a dense layer between said two solid electrolyte layers, and also between said second pumping electrode and said reference electrode;
• and
• forming a second gas diffusion layer that covers said second pumping electrode, said reference electrode and said two solid electrolyte layers.