Guard ring having electrically isolated lightening bars
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTien-Chi Wu, Kou-Chou Chen, Huai-Jen Hsu, George Huang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTien-Chi Wu, Kou-Chou Chen, Huai-Jen Hsu, George Huang
Estimating the term…
A guard ring for protecting against electrostatic discharge (ESD) that has electrically isolated lightening bars is disclosed. The guard ring has a substrate, a first ring, and a second ring. The first ring is on the substrate and has a number of electrically connected lightening bars. The second ring is also on the substrate and concentric to the first ring, but has a number of lightening bars that are electrically isolated from one another. The first ring may be the outer ring and the second ring may be the inner ring, or vice-versa. The guard ring has an ESD breakdown voltage that does not change, even after the first ring or the second ring has protected against ESD. The guard ring may protect a semiconductor component like a semiconductor photomask or a semiconductor device.
A guard ring for electrostatic discharge (ESD) protection comprising:
A photomask comprising:
A method for manufacturing a semiconductor component comprising:
Dependencies are inferred from the claim text.