Gravity-fed in-line continuous processing system and method

A gravity-fed in-line continuous processing system comprising:

• at least one processing chamber disposed between a first load lock and a second load lock, the second load lock disposed lower than the first load lock;
• a first device for isolating the processing chamber from the first load lock and
• a second device for isolating the processing chamber from the second load lock;
• the processing chamber, the first load lock, the second load lock, the first device and the second device are all angled with respect to the horizontal, each having a plurality of tracks, the plurality of tracks structured and arranged such that a plurality of articles slide thereon under the force of gravity from the first load lock, through the processing chamber, and to the second load lock.

A gravity-fed in-line continuous processing system comprising:

• at least one vacuum sputtering chamber disposed between a first load lock and a second load lock, the second load lock disposed lower than the first load lock;
• a first rotary barrel gate valve for isolating the vacuum sputtering chamber from the first load lock, the first rotary gate valve structured and arranged to prevent an article from sliding under the force of gravity when the first rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the first rotary gate valve is open;
• and
• a second rotary barrel gate valve for isolating the vacuum sputtering chamber from the second load lock, the second rotary gate valve structured and arranged to prevent an article from sliding under the force of gravity when the second rotary gate valve is closed and to allow an article to slide therethrough under the force of gravity when the second rotary gate valve is open.

A gravity-fed in-line continuous processing system comprising:

• at least one processing chamber disposed between a first load lock and a second load lock, the second load lock disposed lower than the first load lock;
• a first rotary barrel gate valve for isolating the processing chamber from the first load lock, the first rotary gate valve structured and arranged to prevent an article from sliding under the force of gravity when the first rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the first rotary gate valve is open;
• a second rotary barrel gate valve for isolating the processing chamber from the second load lock, the second rotary gate valve structured and arranged to prevent the article from sliding under the force of gravity when the second rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the second rotary gate valve is open;
• a third rotary barrel gate valve for isolating the first load lock from atmosphere, the third rotary gate valve structured and arranged to prevent the article from sliding under the force of gravity when the third rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the third rotary gate valve is open;
• an input tray terminating at the third rotary barrel gate valve;
• a fourth rotary barrel gate valve for isolating the second load lock from atmosphere, the fourth rotary gate valve structured and arranged to prevent the article from sliding under the force of gravity when the fourth rotary gate valve is closed and to allow the article to slide therethrough under the force of gravity when the fourth rotary gate valve is open;
• an output tray adjacent the fourth rotary barrel gate valve;
• and
• a plurality of tracks angled through the first load lock, the processing chamber, and the second load lock interconnecting the input tray and the output tray to urge, under the force of gravity, articles through the first load lock, the processing chamber, and the second load lock.

A gravity-fed in-line continuous processing system comprising:

• at least one processing chamber module disposed between a first load lock module and a second load lock module, the second load lock module disposed lower than the first load lock module;
• a first device for isolating the processing chamber module from the first load lock module;
• a second device for isolating the processing chamber module from the second load lock module;
• and
• at least one track through the processing chamber module and the first and second load lock modules, the track structured and arranged such that an article slides thereon under the force of gravity.

A gravity-fed in-line continuous processing system comprising:

• means for processing disposed between first means for alternating between a first pressure and a second pressure and a second means for alternating between the first pressure and the second pressure, the second means for alternating disposed lower than the first means for alternating;
• first means for isolating the means for processing from the first means for alternating;
• second means for isolating the means for processing from the second means for alternating;
• and
• at least one track through the means for processing and the first and second means for alternating, the track structured and arranged such that an article slides thereon under the force of gravity.

A gravity-fed in-line continuous processing system comprising:

• at least one means for processing disposed between a first means for alternating between a first pressure and a second pressure and a second means for alternating between the first pressure and the second pressure, the second means for alternating disposed lower than the first means for alternating;
• first means for isolating the means for processing from the first means for alternating, the first means for isolating structured and arranged to prevent an article from sliding under the force of gravity when the first means for isolating is closed and to allow the article to slide therethrough under the force of gravity when the first means for isolating is open;
• second means for isolating the means for processing from the second means for alternating, the second means for isolating structured and arranged to prevent the article from sliding under the force of gravity when the second means for isolating is closed and to allow the article to slide therethrough under the force of gravity when the second means for isolating is open;
• third means for isolating the first means for alternating from atmosphere, the third means for isolating structured and arranged to prevent the article from sliding under the force of gravity when the third means for isolating is closed and to allow the article to slide therethrough under the force of gravity when the third means for isolating is open;
• an input tray terminating at the third means for isolating;
• fourth means for isolating the second means for alternating from atmosphere, the fourth means for isolating structured and arranged to prevent the article from sliding under the force of gravity when the fourth means for isolating is closed and to allow the article to slide therethrough under the force of gravity when the fourth means for isolating is open;
• an output tray adjacent the fourth means for isolating;
• and
• a plurality of tracks angled through the first means for alternating, the means for processing, and the second means for alternating interconnecting the input tray and the output tray to urge, under the force of gravity, articles through the first means for alternating, the means for processing, and the second means for alternating.

A method for coating substrates, the method comprising:

• providing at least one processing chamber;
• disposing the at least one processing chamber between a first load lock and a second load lock, the second load lock disposed lower than the first load lock;
• isolating the processing chamber from the first load lock;
• isolating the processing chamber from the second load lock;
• and
• providing at least one track through the processing chamber and the first and second load locks and structuring and arranging the track such that an article slides thereon under the force of gravity.