Method and apparatus for the multiplexed acquisition of a bar die from a wafer
AssigneeDelaware Capital Formation, Inc.
InventorMichael Summers
Life of this patent
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AssigneeDelaware Capital Formation, Inc.
InventorMichael Summers
Estimating the term…
A method for the co-processing of bare die removal from a semiconductor wafer for the improved throughput of the extraction of die from a wafer for subsequent placement onto a substrate. The apparatus includes a pick head containing a nozzle having a suction port within that secures the bare die as it is removed from the wafer. The intermediate holding station has a plurality of nozzles, each having a vacuum port to secure and buffer a multitude of flipped die that are transferred from the pick nozzle. Vacuum flow valves enable the release and transfer of the bare die. Having a multiple of nozzles provides a buffer for the die as they are subsequently transitioned from the pick nozzle, queued within the intermediate transfer station and loaded in tandem onto a die shuttle.
A die handling apparatus for removing and holding a select group of die from a semiconductor wafer, each of said die having a first and a second planar surface parallel to a plane of the semiconductor wafer, comprising:
A method for handling a select group of die from a wafer having a plurality of die formed thereon, each of said die having a first and a second planar surface parallel to plane the wafer, comprising the steps of:
Dependencies are inferred from the claim text.