Surface micromachined optical system with reinforced mirror microstructure
AssigneeMEMX, Inc.
InventorsJeffry J. Sniegowski, M. Steven Rodgers
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Abstract
Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.
Claims44
A surface micromachined optical system that comprises:
- a first substrate;
- a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate;
- and
- a first actuator associated with said first mirror microstructure, wherein said first mirror microstructure comprises:
- a first structural layer that is disposed in spaced relation to said first substrate;
- a second structural layer that is disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate;
- a first fixed, structural interconnection between said first and second structural layers;
- a third structural layer, wherein said second structural layer is disposed between said first and third structural layers;
- and
- a second fixed, structural interconnection between said second and third structural layers.
A surface micromachined optical system that comprises:
- a first substrate;
- a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate;
- and
- a first actuator associated with said first mirror microstructure, wherein said first mirror microstructure comprises:
- a first structural layer that is disposed in spaced relation to said first substrate;
- a second structural layer that is disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate;
- a third structural layer, wherein said second structural layer is disposed between said first and third structural layers;
- and
- first means for structurally interconnecting said first, second, and third structural layers such that said first structural layer, said second structural layer, and said third structural layer collectively move together in response to said first actuator.
Dependencies are inferred from the claim text.