Surface micromachined optical system with reinforced mirror microstructure
AssigneeMEMX, Inc.
InventorsJeffry J. Sniegowski, M. Steven Rodgers
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Abstract
Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.
Claims45
A surface micromachined optical system that comprises:
- a first substrate;
- a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate;
- and
- a first actuator associated with said first mirror microstructure, wherein said first mirror microstructure comprises:
- a first structural layer disposed in spaced relation to said first substrate;
- a second structural layer disposed in spaced relation to said first structural layer, wherein said first structural layer is disposed between said second structural layer and said first substrate;
- and
- at least one fixed, structural interconnection between said first and second structural layers, wherein said second structural layer comprises an upper surface, wherein a radius of curvature of said upper surface of said second structural layer is at least about 1 meter.
A surface micromachined optical system that comprises:
- a first substrate;
- a first mirror microstructure disposed in spaced relation to and movably interconnected with said first substrate;
- and
- a first actuator associated with said first mirror microstructure, wherein said first mirror microstructure comprises:
- a first structural layer disposed in spaced relation to said first substrate;
- and
- means for structurally reinforcing said first structural layer to provide a radius of curvature for an upper surface of said first structural layer that is at least about 1 meter.
Dependencies are inferred from the claim text.