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US 2003/0210302 A1Published application
Ink-jet printhead and method for producing the same
AssigneeHewlett-Packard Development Company, L.P.
InventorsBrian J. Keefe, Ali Emamjomeh, Roger J. Kolodziej, Michael J. Regan, Harold Lee Van Nice
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Abstract
An ink-jet printhead is provided having a thin film substrate comprising a plurality of thin film layers; a plurality of ink firing heater resistors defined in said plurality of thin film layers; a polymer fluid barrier layer; and a carbon rich layer disposed on said plurality of thin film layers, for bonding said polymer fluid barrier layer to said thin film substrate.
Claims15
A thin film printhead, comprising:
- a thin film substrate comprising a plurality of thin film layers;
- a plurality of ink firing heater resistors defined in said plurality of thin film layers;
- a polymer fluid barrier layer;
- and
- a carbon rich layer disposed on said plurality of thin film layers, for bonding said polymer fluid barrier layer to said thin film substrate.
2 more elements
A thin film printhead, comprising:
- a thin film substrate comprising a plurality of thin film layers;
- a plurality of ink firing heater resistors defined in said plurality of thin film layers;
- a polymer fluid barrier layer;
- and
- a carbon rich layer disposed on said plurality of thin film layers, for bonding said polymer fluid barrier layer to said thin film substrate;
- said carbon rich layer having been formed by
- inserting said substrate into a plasma enhanced chemical vapor deposition chamber;
- evacuating the chamber;
- introducing into the chamber a noble gas and a carbon containing gas;
- delivering power to the chamber;
- maintaining power for a certain length of time sufficient to allow for formation of said carbon rich layer on said substrate;
- evacuating the chamber;
- venting the chamber with a noble gas;
- removing said substrate with the deposited carbon rich layer from the chamber.
11 more elements
Dependencies are inferred from the claim text.