Slurry homogenizer and supply system
AssigneeNanya Technology Corporation
InventorsTun-Yuan Lo, Chih-Pin Hsu, Chih-Kun Chen
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AssigneeNanya Technology Corporation
InventorsTun-Yuan Lo, Chih-Pin Hsu, Chih-Kun Chen
Estimating the term…
A slurry homogenizer. A frame having an outlet is disposed on a driving means having a rotating shaft. A waterproof plate having a first opening is disposed in the frame and on the driving means. Part of the shaft penetrates the first opening. A filter is disposed in the frame and on the plate. A first grinding pad has a second opening and is fitted on the shaft through the second opening. The first grinding pad is disposed in the frame and above the plate. A knob is fitted on the top of the shaft. The knob fixes the first grinding pad on the shaft. A cover having a pipe is disposed on the frame. A second grinding pad having a third opening is fitted on the pipe and disposed in the frame. The second grinding pad and the first grinding pad are separated by a fixed distance.
A slurry homogenizer, comprising:
A slurry supply system for supplying slurry to CMP equipment, comprising:
Dependencies are inferred from the claim text.