System and method for delivering droplets
AssigneeOsram Opto Semiconductors GmbH & Co. OGH
InventorsMatthias Stoessel, Stephan Roeger, Dirk Buchhauser
Life of this patent
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Abstract
Systems and methods are described for delivering droplets. One embodiment provides a system comprising nozzles adapted to deliver droplets to target points on the substrate, a first camera, and means for determining an angular rotation of the substrate in a coordinate system. In some embodiments the means for determining the angular rotation includes a second camera. The substrate has a top surface and alignment marks. The nozzles have droplet delivery openings oriented towards the substrate for delivery of the droplets. The first camera is oriented substantially towards the nozzle openings, and the second camera is oriented substantially towards the substrate top surface.
Claims26
A system for delivering droplets on a substrate, the substrate having a top surface, the system comprising:
- nozzles adapted to deliver droplets to target points on the substrate, the substrate having alignment marks, the nozzles having droplet delivery openings oriented towards the substrate for delivery of the droplets;
- a first camera oriented substantially towards the nozzle openings;
- and
- a second camera oriented substantially towards the substrate top surface.
A method for delivering droplets on a substrate comprising:
- providing nozzles including a first nozzle and a second nozzle, the nozzles disposed in proximity of the substrate;
- obtaining an angular displacement value in a coordinate system, the angular displacement corresponding to at least two alignment marks, the alignment marks disposed on the substrate;
- sequentially placing the first nozzle and the second nozzle in a position in a viewing area of a first camera, the first nozzle and the second nozzle each having at least one opening for the delivery of droplets, the first camera oriented substantially towards the nozzle openings;
- registering sets of coordinates in the coordinate system, each set of coordinates associated with one of the nozzles;
- and
- determining an angular rotation (gamma) of the first nozzle and the second nozzle in the coordinate system.
A method for assessment of the suitability of a print head for manufacturing, the print head having at least a first nozzle and a second nozzle, the first nozzle having at least one droplet delivery opening, the method comprising:
- a) obtaining an angular displacement value in a coordinate system, the angular displacement value corresponding to at least two alignment marks, the alignment marks disposed on a substrate;
- b) sequentially placing the first nozzle and the second nozzle within a viewing area of a first camera, the first camera facing substantially towards the nozzle openings;
- c) registering sets of coordinate data in the coordinate system, each set of coordinate data associated with one of the nozzles;
- d) comparing the sets of coordinate data and the angular rotation data to predetermined suitability values, the comparing step is performed within a system for delivering droplets.
A system for delivering droplets on a substrate, the substrate having a top surface, the system comprising:
- nozzles adapted to deliver droplets to target points on the substrate, the substrate having alignment marks, the nozzles having droplet delivery openings oriented towards the substrate for delivery of the droplets;
- a first camera oriented substantially towards the nozzle openings;
- and
- means for determining an angular rotation of the substrate in a coordinate system.
Dependencies are inferred from the claim text.