Wafer probe station having environment control enclosure
AssigneeCascade Microtech, Inc., an Oregon corporation
InventorsWarren K. Harwood, Paul A. Tervo, Martin J. Koxxy
Life of this patent
Estimating the term…
Abstract
A wafer probe station is equipped with an integrated environment control enclosure substantially surrounding a supporting surface for holding a test device, such enclosure limiting fluid communication between the interior and exterior of the enclosure and preferably also providing EMI shielding and a dark environment. The limited communication between the interior and exterior of the enclosure is kept substantially constant despite positioning movement of either the supporting surface or probes. The positioning mechanisms for the supporting surface and probes each are located at least partially outside of the enclosure.
Claims9
A probe station comprising:
- (a) a chuck for supporting a test device;
- (b) at least one support for a probe to contact said test device;
- (c) an enclosure having a side member and an electrically conductive lower member having a substantially horizontal surface spaced vertically below said chuck;
- and
- (d) a member defining an aperture for receiving a positioner secured to said chuck, said aperture being capable of relative lateral movement with respect to said side member.
Dependencies are inferred from the claim text.