Bump joining method
OwnerShozo Minamitani, Kazushi Higashi +4inventors
InventorsShozo Minamitani, Kazushi Higashi, Kenji Takahashi, Shinji Kanayama, Hiroshi Wada, Takafumi Tsujisawa
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OwnerShozo Minamitani, Kazushi Higashi +4inventors
InventorsShozo Minamitani, Kazushi Higashi, Kenji Takahashi, Shinji Kanayama, Hiroshi Wada, Takafumi Tsujisawa
Estimating the term…
The present invention provides a bump-joining apparatus, a bump-joining method, and a semiconductor component-manufacturing apparatus whereby bumps and electrode portions of circuit board are perfectly joined with higher join strength than in the conventional art. The apparatus includes a vibration generation device, a pressing device and a control unit, wherein bumps are pressed to electrode portions of a circuit board and vibrated with ultrasonic waves after reaching an initial contact area before reaching a join-completed-contact area at a completion of the joining, so that the bumps are more perfectly joined to the electrode portion than in the conventional art which vibrates the bump only after reaching the join-completed-contact area. Larger join strength is achieved than in the conventional art.
A bump-joining apparatus for joining bumps formed at an electronic component to electrode portions on a circuit board, which comprises:
A bump-joining apparatus for joining bumps formed at an electronic component to electrode portions on a circuit board, which comprises:
Dependencies are inferred from the claim text.