Object plating method and system
AssigneeThe BOC Group, Inc.
InventorsOlivier J. Blachier, Frank Jansen, Colin John Dickinson, Peter M. Pozniak
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AssigneeThe BOC Group, Inc.
InventorsOlivier J. Blachier, Frank Jansen, Colin John Dickinson, Peter M. Pozniak
Estimating the term…
A method and system are disclosed for plating objects. At least one aspect associated with the object plating is monitored to determine the amount of at least one byproduct created during the plating and/or the reduction in the amount of at least one plating component. Based on this monitored aspect, an adjustment is made to the flow rate of substances added to a plating cell and/or the flow rate of used plating substances drained from the plating cell. The used plating substances are purified to remove at least some of the byproduct and then the purified plating substances are combined with at least one component before passing back into the plating cell to reuse at least some of the plating substances. The method and system could be used during the plating of semiconductor wafers with copper.
A method of plating objects, the method comprising:
A method of plating objects, the method comprising:
A method of plating objects, the method comprising:
A system for use with a plating cell configured to plate objects, the plating cell being associated with means for adding plating substances to the plating cell, and means for draining used plating substances from the plating cell, the used plating substances including at least one byproduct of at least one of the plating substances, the byproduct being created during plating of the objects in the plating cell, the system comprising:
A system for use with a plating cell configured to plate objects, the plating cell being associated with means for adding plating substances to the plating cell, the amount of at least one component of the plating substances being reduced during plating of objects in the plating cell, and means for draining used plating substances from the plating cell, the system comprising:
A system for use with a plating cell configured to plate objects, the plating cell being associated with means for adding plating substances to the plating cell, and means for draining used plating substances from the plating cell, the used plating substances including at least one byproduct of at least one of the plating substances, the byproduct being created during plating of the objects in the plating cell, the system comprising:
A controller for use in a plating system wherein plating substances are added to a plating cell, objects are plated in the plating cell, at least one byproduct is created during the plating, used plating substances including the at least one byproduct are drained from the plating cell, and a purifier purifies the used plating substances to remove at least some of at least one byproduct created during plating of the objects in the plating cell, the controller comprising a configuration wherein the following equation is satisfied:
A method of plating objects, the method comprising:
A controller for use in a plating system wherein plating substances are added to a plating cell, objects are plated in the plating cell, at least one byproduct is created during the plating, used plating substances including the at least one byproduct are drained from the plating cell, a purifier purifies the used plating substances to remove at least some of at least one byproduct created during plating of the objects in the plating cell, at least one component is combined with the purified plating substance to create a mixture of plating substances, and the mixture of plating substances is pass into the plating cell, the controller comprising a configuration wherein the following equation is satisfied:
A method of plating objects, the method comprising:
Dependencies are inferred from the claim text.