Substrates laminating apparatus and method
AssigneeShibaura Mechatronics Corporation
InventorsIkuo Hayafuji, Shinichi Ogimoto
Life of this patent
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Abstract
At least when an upper glass substrate 3 held by an upper retention head 10 and a lower glass substrate 4 held by a lower retention head 11 are abutted on each other through a sealing material 5, air cylinders 25, 25 apply a lifting force balancing with a dead weight of the upper retention head 10 to the upper retention head 10 to cancel its dead weight. In this state, the upper glass substrate 3 and the lower glass substrate 4 are abutted on each other through the sealing material 5.
Claims8
A substrate laminating apparatus, comprising:
- an upper retention head for holding an upper substrate;
- a lower retention head which holds a lower substrate and is disposed while facing the upper retention head, the upper and lower retention heads laminating the upper and lower substrates so as to interpose adhesive therebetween, which are respectively held by the lower and upper retention heads, by allowing the lower and upper retention heads to be close to each other relatively;
- an elevating device for relatively moving the upper retention head and the lower retention head in upper and lower directions;
- and
- a lifting force application device for applying a lifting force to at least one of the upper retention head and the lower retention head at least when the upper substrate held by the upper retention head and the lower substrate held by the lower retention head are abutted each other through the adhesive by the elevating device.
A substrate laminating apparatus, comprising:
- an upper retention head for holding an upper substrate;
- a lower retention head which holds a lower substrate and is disposed while facing the upper retention head, the upper and lower retention head laminating the upper and lower substrates so as to interpose adhesive therebetween, which are respectively held by the lower and upper retention heads, by allowing the lower and upper retention heads to be close to each other relatively;
- an elevating device for vertically moving the upper retention head;
- and
- a lifting force application device for applying a lifting force to the upper retention head at least when the upper substrate held by the upper retention head and the lower substrate held by the lower retention head are abutted each other through the adhesive by the elevating device.
A substrate laminating method, comprising the steps of:
- allowing an upper substrate and a lower substrate to be close to each other relatively, which are respectively held by an upper retention head and a lower retention head;
- applying a predetermined pressing force by applying a lifting force in an upper direction and a pressing force in a lower direction to at least one of the upper retention head and the lower retention head when the upper substrate and the lower substrate are abutted on each other through an adhesive;
- and
- laminating the upper and lower substrates through the adhesive while controlling the lifting and pressing force.
Dependencies are inferred from the claim text.