Apparatus for treating a workpiece with steam and ozone
AssigneeSemitool, Inc.
InventorEric J. Bergman
Life of this patent
Estimating the term…
Abstract
In a method for processing a workpiece to remove material from a first surface of the workpiece, steam is introduced onto the first surface under conditions so that at least some of the steam condenses and forms a liquid boundary layer on the first surface. The condensing steam helps to maintain the first surface of the workpiece at an elevated temperature. Ozone is provided around the workpiece under conditions where the ozone diffuses through the boundary layer and reacts with the material on the first surface. The temperature of the first surface is controlled to maintain condensation of the steam.
Claims22
An apparatus for processing a workpiece, comprising:
- a process chamber;
- a workpiece holder in the process chamber for holding the workpiece;
- a steam generator connecting with the process chamber for delivering steam into the process chamber;
- an ozone generator connecting with the process chamber for delivering ozone into the process chamber;
- and
- a cooling fluid supply connecting with the process chamber for delivering a cooling fluid to a second side of the workpiece.
An apparatus for processing a workpiece, comprising:
- a process chamber;
- a workpiece holder in the process chamber for holding the workpiece;
- a steam generator connecting into the process chamber for delivering steam into the process chamber;
- an ozone generator connecting into the process chamber for delivering ozone into the process chamber;
- and
- a heat sink in contact with a second side of the workpiece for maintaining the workpiece at a temperature lower than the temperature of the steam.
An apparatus for processing a workpiece, comprising:
- a process chamber;
- a workpiece holder in the process chamber for holding the workpiece;
- means for delivering steam into the process chamber;
- means for delivering ozone into the process chamber;
- and
- means for cooling the workpiece to a temperature lower than a temperature of the steam.
Dependencies are inferred from the claim text.