Aluminum nitride materials and members used for the production of semiconductors
AssigneeNGK Insulators, Ltd.
InventorsNaomi Teratani, Jun Yoshikawa, Yuji Katsuda
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AssigneeNGK Insulators, Ltd.
InventorsNaomi Teratani, Jun Yoshikawa, Yuji Katsuda
Estimating the term…
An object of the present invention is to provide an aluminum nitride material having a high thermal conductivity and reduced volume resistivity at room temperature. An aluminum nitride material has interconnected intergranular phase functioning as electrical conductive phase. The material has a content of the conductive phase of not higher than 20 percent, calculated according to the following formula based on an X-ray diffraction profile. Content of the conductive phase (%)=(Integrated strength of the strongest peak of the conductive phase/Integrated strength of the strongest peak of aluminum nitride phase)×100. Alternatively, the material has an electric current response index of not lower than 0.9 and not higher than 1.1 defined according to the following formula. Electric current response index=(Electric current at 5 seconds after a voltage is applied/Electric current at 60 seconds after a voltage is applied).
An aluminum nitride material comprising interconnected intergranular phase functioning as electrical conductive phase, said material having a content of said conductive phase of not higher than 20 percent calculated according to the following formula based on an X-ray diffraction profile.
An aluminum nitride material comprising interconnected intergranular phase functioning as electrical conductive phase, said material having an electric current response index of not lower than 0.9 and not higher than 1.1 defined according to the following formula.
An aluminum nitride material comprising interconnected intergranular phase functioning as electrical conductive phase, said material having a nonlinear index “a” of not higher than 1.5 in a range of an applied voltage “V” of 50 V/mm to 500 V/mm, provided that I=kV a, where “I” represents a current value and “k” represents a constant.
Dependencies are inferred from the claim text.