Radiation-sensitive resin composition

A radiation-sensitive resin composition comprising:

• (A) an alkali insoluble or scarcely alkali-soluble resin having an acid-dissociable protecting group of the following formula [I],
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• wherein R1 groups individually represent a monovalent alicyclic hydrocarbon group having 4-20 carbon atoms or a derivative thereof, or a linear or branched alkyl group having 1-4 carbon atoms, provided that at least one of the R1 groups is the monovalent alicyclic hydrocarbon group having 4-20 carbon atoms or a derivative thereof, or any two of the R1 groups form, in combination and together with the carbon atom to which the two R1 groups bond, a divalent alicyclic hydrocarbon group having 4-20 carbon atoms or a derivative thereof, with the remaining R1 group being the linear or branched alkyl group having 1-4 carbon atoms or the monovalent alicyclic hydrocarbon group having 4-20 carbon atoms or the derivative thereof,
• (B) a photoacid generator, and
• (C) propylene glycol monomethyl ether acetate, γ-butyrolactone, and cyclohexanone as solvents.