Method of forming substrate for fluid ejection device
AssigneeHewlett-Packard Development Company, L.P.
InventorsChien-Hua Chen, Kenneth Michael Kramer
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Abstract
A method of forming an opening through a substrate having a first side and a second side opposite the first side includes extending spaced etch stops into the substrate from the first side, etching into the substrate between the spaced etch stops, and etching into the substrate from the second side toward the first side to the spaced etch stops. Etching into the substrate between the spaced etch stops includes forming a first portion of the opening and etching into the substrate to the spaced etch stops includes forming a second portion of the opening.
Claims63
A method of forming an opening through a substrate having a first side and a second side opposite the first side, the method comprising:
- extending spaced etch stops into the substrate from the first side;
- etching into the substrate between the spaced etch stops, including forming a first portion of the opening;
- and
- etching into the substrate from the second side toward the first side to the spaced etch stops, including forming a second portion of the opening.
A method of forming a substrate for a fluid ejection device, the method comprising:
- forming spaced slots in the substrate from a first side;
- forming spaced etch stops in the spaced slots;
- etching a first portion of a fluidic channel into the substrate between the spaced etch stops;
- and
- etching a second portion of the fluidic channel into the substrate from a second side opposite the first side to the spaced etch stops.
A substrate for a fluid ejection device, the substrate comprising:
- a first side;
- a second side opposite the first side;
- spaced etch stops extending into the substrate from the first side;
- and
- a fluidic channel communicating with the first side and the second side,
- wherein a first portion of the fluidic channel extends from the first side toward the second side between the spaced etch stops and a second portion of the fluidic channel extends from the second side toward the first side to the spaced etch stops.
Dependencies are inferred from the claim text.