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AssigneeAgilent Technologies, Inc.
InventorsNasser Ali Jafari, Kenneth Dean Karklin, William T. Sprague
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A planarization gauge assures probe card-to-wafer parallelism in semiconductor automatic test equipment (ATE) used for wafer test, and provides a standard system reference plane during the building and testing of ATE components. The planarization gauge has two planar and parallel surfaces that may serve as a system reference plane The planarization gauge has at least one access hole for a depth gauge, and at least one optical target recognizable by a prober's upward looking camera. The planarization gauge is mechanically interchangeable with a probe card; thus, it is compatible with different planarization methods and platforms used in building and testing ATE components. The planarization gauge is manufactured and inspected in a manner as to assure traceability to established standards such as NIST. When used by all ATE vendors, the planarization gauge ensures correlation between the vendors' various planarization methods.
A planarization apparatus for use in semiconductor automatic test equipment (ATE), comprising:
A method for achieving probe card planarity in semiconductor automatic test equipment (ATE), comprising:
A method for achieving probe card planarity in semiconductor automatic test equipment (ATE), comprising:
Dependencies are inferred from the claim text.