Hydraulically amplified PZT mems actuator
AssigneeThe Regents of the Universsity of California
InventorRobin R. Miles
Life of this patent
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Abstract
A hydraulically amplified microelectromechanical systems actuator. A piece of piezoelectric material or stacked piezo bimorph is bonded or deposited as a thin film. The piece is operatively connected to a primary membrane. A reservoir is operatively connected to the primary membrane. The reservoir contains a fluid. A membrane is operatively connected to the reservoir. In operation, energizing the piezoelectric material causing the piezoelectric material to bow. Bowing of the piezoelectric material causes movement of the primary membrane. Movement of the primary membrane results in a force in being transmitted to the liquid in the reservoir. The force in the liquid causes movement of the membrane. Movement of the membrane results in an operating actuator.
Claims17
A hydraulically amplified microelectromechanical systems actuator, comprising:
- an operating member,
- a primary membrane operatively connected to said piezoelectric material,
- a reservoir operatively connected to said primary membrane,
- a fluid in said reservoir, and
- an actuator member operatively connected to said reservoir.
An microelectromechanical systems actuating method utilizing a piezoelectric material, a primary membrane, a reservoir containing a fluid, a membrane, and an actuator, comprising the steps of:
- energizing said piezoelectric material causing said piezoelectric material to bow and causing movement of said primary membrane,
- said movement of said primary membrane resulting in a force in said liquid in said reservoir,
- said force in said liquid causing movement of said membrane, and
- said movement of said membrane causing movement of said actuator.
Dependencies are inferred from the claim text.