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US 2003/0201304 A1Published application
Transport apparatus with a gripper for the transport of substrates
OwnerDominik Hartmann, Reto Schubigerinventors
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Abstract
A transport apparatus comprises a gripper for the transport of substrates. The gripper has a plate on the underside of which the vacuum grippers can be attached magnetically. The plate preferably consists of steel and each vacuum gripper has a permanent magnet. The transport apparatus is suitable for use on a Die Bonder.
Claims12
A transport apparatus with a gripper for the transport of substrates, the gripper comprising a plate and several vacuum grippers, the vacuum grippers magnetically fixed to the plate.
Dependencies are inferred from the claim text.