Substrate and method forming substrate for fluid ejection device
AssigneeHewlett-Packard Development Company, L.P.
InventorsChien-Hua Chen, Donald W. Schulte, Terry E. McMahon
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Abstract
A method of forming an opening through a substrate having a first side and a second side opposite the first side includes forming spaced etch stops in the first side of the substrate, etching into the substrate from the second side toward the first side to the spaced etch stops, and etching into the substrate between the spaced etch stops from the second side. Etching into the substrate to the spaced etch stops includes forming a first portion of the opening and etching into the substrate between the spaced etch stops includes forming a second portion of the opening.
Claims53
A method of forming an opening through a substrate having a first side and a second side opposite the first side, the method comprising:
- forming spaced etch stops in the first side of the substrate, including growing the spaced etch stops in and consuming portions of the substrate;
- etching into the substrate from the second side toward the first side to the spaced etch stops, including forming a first portion of the opening;
- and
- etching into the substrate between the spaced etch stops from the second side through the first portion of the opening to the first side, including forming a second portion of the opening.
A method of forming a substrate for a fluid ejection device, the method comprising:
- forming spaced slots in a first side of the substrate;
- forming spaced etch stops in the spaced slots;
- etching a first portion of a fluidic channel into the substrate from a second side opposite the first side to the spaced etch stops;
- and
- etching a second portion of the fluidic channel into the substrate between the spaced etch stops from the second side through the first portion of the opening to the first side.
A substrate for a fluid ejection device, the substrate comprising:
- a first side;
- a second side opposite the first side;
- spaced etch stops formed in the first side of the substrate;
- and
- a fluidic channel communicating with the first side and the second side, wherein a first portion of the fluidic channel extends from the second side toward the first side to the spaced etch stops and a second portion of the fluidic channel extends between the spaced etch stops from the first portion of the fluidic channel to the first side.
A substrate for a fluid ejection device, the substrate comprising:
- a first side;
- a second side opposite the first side;
- spaced etch stops formed in the first side of the substrate by filling spaced slots formed in the first side of the substrate and consuming portions of the substrate adjacent the spaced slots;
- and
- a fluidic channel communicating with the first side and the second side, wherein a first portion of the fluidic channel extends from the second side toward the first side to the spaced etch stops and a second portion of the fluidic channel extends between the spaced etch stops from the first portion of the fluidic channel to the first side.
Dependencies are inferred from the claim text.