Substrate coated with an MgO-layer
AssigneeBalzers Hochvakuum AG
InventorsJohannes Stollenwerk, Christoph Daube, Achim Gurke
Life of this patent
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Abstract
A coating apparatus has two Mg-targets mutually defining a slit and with a target Mg material purity of at least 99%. An anode arrangement and a gas inlet arrangement are adjacent a first end area of the slit, the gas inlet arrangement being connected to a gas tank arrangement with a working gas. The apparatus has a substrate carrier and conveying arrangement with which a planar substrate is movable across and distant from a second slit end area opposite the first end area and a further gas inlet arrangement is situated between the second slit end area and the substrate carrier and conveying arrangement and is connected to a gas tank arrangement containing oxygen.
Claims19
A coating apparatus, comprising:
- two Mg-targets mutually defining a slit and with a target Mg material purity of at least 99%;
- adjacent a first end area of said slit, an anode arrangement and a gas inlet arrangement, said gas inlet arrangement being connected to a gas tank arrangement with a working gas;
- a substrate carrier and conveying arrangement with which a planar substrate is movable across and distant from a second slit end area opposite to said first end area;
- and
- a further gas inlet arrangement situated between said second slit end area and said substrate carrier and conveying arrangement and being connected to a gas tank arrangement containing oxygen.
A substrate coated with at least one MgO-layer and with an extent of at least 100 mm×100 mm, wherein said layer has a predominant peak in the measuring diagram of the Θ-2Θ-method.
Dependencies are inferred from the claim text.