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US 2003/0200813 A1Published application
Pressure sensor with a corrosion-resistant diaphragm
AssigneeDenso Corporation
InventorsHironobu Baba, Yukihiro Kato, Hiroshi Nomura, Haruhisa Koike
Life of this patent
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Abstract
A pressure sensor includes a sensor device and a diaphragm. The diaphragm is exposed to a fluid, a pressure relative to which is detected using the sensor device. The diaphragm is made of a material having a pitting index, which is defined by the equation, (Cr+3.3Mo+20N), of 50 or greater and Ni content of 30 weight % or greater to prevent the diaphragm from corroding due to the fluid.
Claims15
A pressure sensor comprising:
- a sensor device;
- and
- a first diaphragm, wherein the first diaphragm is exposed to a first fluid, a pressure relative to which is detected using the sensor device, and wherein the first diaphragm is made of a material having a pitting index, which is defined by an equation, (Cr+3.3Mo+20N), of 50 or greater and Ni content of 30 weight % or greater to prevent the first diaphragm from corroding due to the first fluid.
Dependencies are inferred from the claim text.