Atomic force microscope
AssigneeHewlett-Packard Development Company, L.P.
InventorsDarin D. Lindig, Anthony P. Holden
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Abstract
An atomic force microscope for examining a sample is described. The atomic force microscope includes a probe assembly that includes a first tip and a second tip each directed towards a surface of a sample. The AFM further includes a source for applying a potential across the first tip and the second tip; at least one mechanism operable to cause relative motion between the surface and the probe; and at least one sensor operable to sense current flowing between the first tip and the second tip.
Claims24
An atomic force microscope, comprising:
- (a) a probe having a cantilever portion and a first and a second tip each extending from the cantilever portion;
- (b) means for positioning the probe so that the first tip and the second tip contact a target area of the sample;
- (c) means for impressing a potential across the first tip and the second tip while the first tip and the second tip are each in contact with the target area;
- and
- (d) means for detecting current flowing between the first tip and the second tip while the first tip and the second tip are each in contact with the target area.
An atomic force microscope (AFM) for examining a sample, comprising:
- (a) a probe assembly including a first tip and a second tip each directed towards a surface of the sample;
- (b) a source for applying an electrical potential across the first tip and the second tip;
- (c) at least one mechanism operable to cause relative motion between the surface and the probe;
- and
- (d) at least one sensor operable to sense current flowing between the first tip and the second tip.
An AFM probe, comprising:
- a cantilever portion and a plurality of tips extending from a surface of the cantilever portion.
In an atomic force microscope, a method of performing a task, the method comprising:
- (a) providing an AFM probe assembly including a first tip and a second tip;
- (b) positioning the probe to a first coordinate relative to a sample;
- (c) while the probe is positioned to the first coordinate, using the first tip and the second tip to verify the probe is in contact with a target area of the sample;
- and
- (d) while the probe is positioned to the first coordinate, performing the task.
The method of claim 24, wherein the sample includes an MRAM device.
Dependencies are inferred from the claim text.