US 2003/0198899 A1Published application

Method for manufacturing an ink jet head

AssigneeCanon Kabushiki Kaisha

InventorNorio Ohkuma

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Abstract

A method for manufacturing an ink jet head, which is provided with a discharge port member having discharge ports arranged for discharging ink, comprises the step of forming the discharge port member by a first photosensitive resin layer, and a second photosensitive resin layer having water-repellency, which is laminated on the first photosensitive resin layer, and the step of giving pattern-exposure and development to these layers for the formation of a structure having the portion where both the first photosensitive resin layer and the second photosensitive resin layers are removed, and the portion where the second photosensitive resin layer is partially removed. With this method, the water-repellent area and non-water-repellent area can be provided for the nozzle surface, hence making it possible to form on the nozzle surface of an ink jet head the water-repellent area and hydrophilic area in exact positioning precision without increasing the number of processing steps.

Claims7

Dependent claims

A method for manufacturing an ink jet head provided with a discharge port member having discharge ports for discharging ink arranged therefor, comprising the following steps of:

forming an ink flow-path pattern by soluble resin on a substrate having ink discharge pressure generating element formed thereon;
laminating on said ink flow-pass pattern a first photosensitive resin layer for forming said discharge port member;
laminating on said first photosensitive resin layer, a second photosensitive resin layer having water-repellency for forming said discharge port member;
forming a first latent-image pattern reaching the bottom portion of said first photosensitive resin layer, and a second latent-image pattern exceeding the second photosensitive resin layer, but not reaching the bottom portion of the first photosensitive resin layer by giving pattern exposure to said first photosensitive resin layer and second photosensitive resin layer simultaneously by use of mask, while controlling partially the exposed area of the exposed portion at the time of giving said pattern exposure so as to make the depths of latent images different;
forming hydrophilic portion having the discharge port and first photosensitive resin layer exposed by developing said pattern-exposed first photosensitive resin layer and second photosensitive resin layer;
and
removing said ink flow-path pattern formed by soluble resin.

4 more elements

Dependencies are inferred from the claim text.