Layer forming method, layer forming apparatus, device, manufacturing method for device, and electronic apparatus
AssigneeSeiko Epson Corporation
InventorsMinoru Koyama, Toshimitsu Hirai
Life of this patent
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Abstract
A plurality of unit areas (bit) B are set on a base board (S). A liquid drop made of a liquid member is ejected to the unit area B from a liquid drop ejecting head (34) so as to form a layer on the base board (S). A first pattern is formed by a first nozzle group Na in nozzles N which are formed in the liquid drop ejecting head (34). A second pattern is formed by a second nozzle group Nb which is different from the first nozzle group Na. By doing this, it is possible to maintain a stable ejection operation so as to form a pattern in preferable accuracy when patterns having different features are formed on the base board by using the liquid drop ejecting apparatus.
Claims11
A layer forming method for setting a plurality of unit areas on a base board and ejecting a liquid drop made from a liquid member from a liquid drop ejecting head to the unit area and forming a layer on the base board, comprising steps of:
- forming a first pattern by a first nozzle group which in formed in the liquid drop ejecting head;
- and
- forming a second pattern by a second nozzle group which is different from the first nozzle group.
A layer forming apparatus for setting a plurality of unit areas on a base board and ejecting a liquid drop made from a liquid member from a liquid drop ejecting head to the unit area and forming a layer on the base board, wherein:
- the layer forming apparatus is provided with a controlling section for controlling an ejection operation of a liquid drop ejection head which forms a first pattern by a first nozzle group of the nozzles which are formed on a liquid drop ejecting head and forms a second pattern by a second nozzle group which is different from the first nozzle group.
A manufacturing method for a device which is manufactured by setting a plurality of unit areas on a base board and ejecting a liquid drop made from a liquid member from a liquid drop ejecting head to the unit area and forming a layer on the base board, comprising steps of:
- forming a first pattern by a first nozzle group which are formed in the liquid drop ejecting head;
- forming a second pattern by a second nozzle group which is different from the first nozzle group;
- and
- forming the layer on the base board.
Dependencies are inferred from the claim text.