Sterilizing apparatus and method using the same
AssigneesMitsubishi Heavy Industries, Ltd., TSURU GAKUEN Educational Institution
InventorsYuji Asahara, Mitsuhiro Yoshida, Toshiaki Katsura, Ikuo Wakamoto, Toshinori Takagi, Takeshi Tanaka
Life of this patent
Estimating the term…
Abstract
In a sterilizing apparatus, a first electrode is provided in a chamber, and a target to be sterilized is supported by the first electrode. The first AC power supply is connected to the first electrode to supply AC power to the first electrode such that a plasma is generated around the first electrode. The DC pulse power supply is connected to the first electrode to supply DC pulse power to the first electrode such that ions or electrons are accelerated toward the target.
Claims24
A sterilizing apparatus comprising:
- a chamber;
- a first electrode provided in said chamber, a target to be sterilized being supported by said first electrode;
- a first AC power supply connected to said first electrode to supply AC power to said first electrode such that a plasma is generated around said first electrode;
- and
- a DC pulse power supply connected to said first electrode to supply DC pulse power to said first electrode such that ions or electrons are accelerated toward said target.
A method of carrying out sterilization of a target, comprising the steps of:
- (a) supporting a target by a first electrode in a chamber;
- (b) generating a plasma around said target between said first electrode and a second electrode in said chamber;
- and
- (c) accelerating one of a set of positive ions and a set of electrons and negative ions in said plasma toward said sterilized target.
Dependencies are inferred from the claim text.