Method for reducing data storage requirements for defects identified on semiconductor wafers
OwnerYervant D. Lepejianinventor
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Abstract
A method for reducing data storage requirements for defects identified on one or more related semiconductor wafers is described. The method includes: receiving images of one or more related semiconductor wafers; identifying defects on the one or more related semiconductor wafers by comparing the received images with corresponding images of a model semiconductor wafer having an identical integrated circuit design as the one or more related semiconductor wafers; and compressing information of the identified defects for data storage.
Claims37
A method for reducing data storage requirements for defects identified on a semiconductor wafer, comprising:
- receiving an image of a semiconductor wafer;
- identifying defects on said semiconductor wafer by comparing said received image with a corresponding image of a model semiconductor wafer having an identical integrated circuit design as said semiconductor wafer;
- and
- compressing information of said identified defects for data storage.
A method for reducing data storage requirements for defects identified on related semiconductor wafers, comprising:
- receiving images of related semiconductor wafers;
- identifying defects on said related semiconductor wafers by comparing said received images one at a time with corresponding images of a model semiconductor wafer having an identical integrated circuit design as said related semiconductor wafers;
- and
- compressing information of said identified defects for data storage.
A method for reducing data storage requirements for defects identified on a semiconductor wafer, comprising:
- generating a differential image by subtracting pixel values of an image of a model semiconductor wafer from corresponding pixel values of an image of a semiconductor wafer having a same integrated circuit design as said model semiconductor wafer;
- generating an image of at least one identified defect from said differential image;
- and
- compressing said image of said at least one identified defect for data storage.
Dependencies are inferred from the claim text.