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AssigneeHitachi High-Technologies Corporation
InventorsMasato Kazui, Mitsuji Ikeda, Atsushi Takane
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An electron beam applied from an electron gun 1 and reflected off a surface of a specimen 7 placed on a stage 2 that is tilted at a tilt angle φ=0 is detected, and a signal intensity thereof is measured by an electron detector 3. Based upon the measurement, an image processing unit 6 calculates a slope angle θ of the surface of the specimen, and determines candidates for cross-sectional shape of the specimen. Signal intensity of the electromagnetic wave that would be reflected from a surface having a cross-sectional shape of each of the candidates if the tilt angle φ were changed into φ=φ0 are estimated, and compared with a signal intensity actually measured by the electron detector 3 with the tilt angle 100 being changed into φ=φ0). Consequently, cross sectional shape and three-dimensional shape can be determined based upon a result of comparison, without utilizing a matching process of feature points.
A shape measurement method comprising the steps of:
A shape measurement apparatus comprising:
Dependencies are inferred from the claim text.