Interferometry method and apparatus for producing lateral metrology images
AssigneeZygo Corporation
InventorPeter J. De Groot
Life of this patent
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Abstract
A method including: generating a sequence of phase-shifted interferometry images of an object surface relative to a reference surface; and calculating an unequally weighted average of the phase-shifted interferometry images to produce a final image. The final image can be useful as a lateral metrology image. The method may further include calculating a surface topography image from the sequence of phase-shifted interferometry images. Embodiments further include apparatus related to the method.
Claims39
A method comprising:
- generating a sequence of phase-shifted interferometry images of an object surface relative to a reference surface;
- and
- calculating an unequally weighted average of the phase-shifted interferometry images to produce a final image.
A method comprising calculating an unequally weighted average of a sequence of phase-shifted interferometry images to produce a final image.
An apparatus comprising a computer readable medium which causes a processor to calculate an unequally weighted average of a sequence of phase-shifted interferometry images to produce a final image.
An apparatus comprising:
- an interferometer which during operation generates a sequence of phase-shifted interferometry images of an object surface relative to a reference surface;
- and
- an electronic controller coupled to the interferometer, wherein during operation the electronic controller calculates an unequally weighted average of the phase-shifted interferometry images to produce a final image.
An method for obtaining a fringe-free intensity image from a sequence of phase-shifted interference patterns, the method comprising:
- providing the sequence of phase-shifted interference patterns;
- and
- calculating a weighted average of the phase-shifted interference patterns to produce the fringe-free intensity image.
An interferometry system comprising:
- an interferometer for providing a sequence of phase-shifted interference patterns;
- and
- an electronic controller coupled to the interferometer, wherein during operation the interferometer calculates a weighted average of the phase-shifted interference patterns to produce a fringe-free intensity image.
Dependencies are inferred from the claim text.