Lithographic apparatus and device manufacturing method

#1. Field of the Invention

#The present invention relates to a lithographic projection apparatus and a device manufacturing method.

#2. Description of the Related Art

#Embodiments of the invention will now be described, by way of example only, with reference to the accompanying schematic drawings in which:

#FIG. 1 depicts a lithographic projection apparatus according to an embodiment of the invention;

#FIG. 2 schematically shows an apparatus according to an embodiment of the present invention;

#In the Figures, corresponding reference symbols indicate corresponding parts.

#FIG. 1 schematically depicts a lithographic projection apparatus 1 according to the present invention including a base plate BP; a radiation system Ex, IL, constructed and arranged to supply a projection beam PB of radiation (e.g. UV radiation), which in this particular case also comprises a radiation source LA; a first object (mask) table MT provided with a mask holder constructed and arranged to hold a programmable patterning device MA (e.g. an SLM), and connected to a first positioning device PM constructed and arranged to accurately position the programmable patterning device MA with respect to a projection system or lens PL; a second object (substrate) table WT provided with a substrate holder constructed and arranged to hold a substrate W (e.g. a resist-coated silicon wafer), and connected to a second positioning device PW constructed and arranged to accurately position the substrate W with respect to the projection system or lens PL. The projection system or lens PL (e.g. a quartz and/or CaF2 lens system or a catadioptric system comprising lens elements made from such materials, or a mirror system) is constructed and arranged to image an irradiated portion of the programmable patterning device MA onto a target portion C (e.g. comprising one or more dies) of the substrate W.

#As here depicted, the apparatus is of a reflective type (e.g. has a reflective programmable patterning device). However, in general, it may also be of a transmissive type, for example (e.g. with a transmissive programmable patterning device). Alternatively, the apparatus may employ another kind of patterning device, such as a programmable LCD array of a type as referred to above.