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AssigneeCanon Kabushiki Kaisha
InventorsShuji Koyama, Toshio Kashino, Hiroaki Mihara
Estimating the term…
Patterning is performed to thermal oxide films 12a and 12b formed on both surface sides of a silicon substrate in which crystal orientation of a surface is (100) or (110), a liquid chamber pattern and a liquid supplying port pattern are formed, and a liquid chamber and a liquid supplying port are formed separately by anisotropically etching the silicon substrate from both surface sides at the same time. Then, a silicon nitride film is deposited with a low pressure chemical vapor deposition to both surface sides of the silicon substrate and all faces of the liquid chamber and the liquid supplying port which are formed by etching. As a result, when the silicon substrate is used for a top plate, stiffness of the top plate is improved, design freedom of the liquid chamber and the liquid supplying port is increased, misalignment is prevented in bonding to the substrate, degradation of ejecting performance is prevented, and a liquid discharge head having high preciseness and high reliability can be provided.
A liquid discharge head comprising a first substrate in which a discharge energy generating element for ejecting a liquid is arranged and a liquid channel wall dividing a liquid channel for guiding the liquid is formed, and a second substrate in which a liquid chamber storing the liquid is formed on one surface thereof and a liquid supplying port receiving the liquid supplied to said liquid chamber is formed on the other surface thereof,
A method of manufacturing a liquid discharge head having a first substrate in which a discharge energy generating element for ejecting a liquid is arranged and a liquid channel wall dividing a liquid channel for guiding the liquid is formed and a second substrate in which a liquid chamber storing the liquid is formed on one surface thereof and a liquid supplying port receiving the liquid supplied to the liquid chamber is formed on the other surface thereof, the first substrate and the second substrate being bonded,
Dependencies are inferred from the claim text.
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From the US filing history. Foreign family members aren’t listed.
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Production of bubble jet print heads: of the edge shooter type
Structure of the pressure chamber: geometrical characteristics
Structure of the pressure chamber: movable member in the chamber
Manufacturing processes: bonding and adhesion
Term end not estimated
1. Field of the Invention
The present invention relates to a liquid discharge head which ejects (discharges) a droplet to adhere to a recording medium and performs printing, image formation, or the like, and a method of manufacturing the same.
2. Related Background Art
FIG. 1 is a schematically perspective view, partly broken away to show an embodiment of a liquid discharge head according to the invention;
FIG. 2 is a schematically sectional view of the embodiment of the liquid discharge head according to the invention;
FIGS. 3A, 3B, 3C, 3D, 3E, 3F, 3G and 3H show a step of manufacturing a top plate used for a single color liquid discharge head in the embodiment of the liquid discharge head according to the invention;
Preferred embodiments of the invention will be described below referring to the accompanying drawings.
FIG. 1 is a schematically perspective view, partly broken away to show an embodiment of the liquid discharge head according to the invention, FIG. 2 is a schematically sectional view of the embodiment of the liquid discharge head according to the invention, and FIGS. 3A to 3H is a view showing a step of manufacturing a top plate used for a single color liquid discharge head in the embodiment of the liquid discharge head according to the invention. FIGS. 3E to 3H are sectional views taken on line 3E-3E of FIG. 3A, line 3F-3F of FIG. 3B, line 3G-3G of FIG. 3C, and line 3H-3H of FIG. 3D respectively.
First of all the top plate used for single color liquid discharge head of the embodiment will be described referring to FIGS. 3A to 3H showing its manufacturing step.